Principle of Operation

precSYS lets you 3D-position the focalspot onto workpieces with

precise tracking of angles of incidence (AOI). You can simultaneously

vary progression of focal motion, angles of incidence and laser intensities

etc. High-end scan technology with small mirror rotation angles and

low moving masses ensure highly dynamic processing with trepanning

or precession frequencies up to 650 Hz (39 000 rpm). The system

works without any rotary optics.

Advanced digital encoders, control algorithms and application-optimized

servo control enable contour-true, speed independent processing with

maximum precision. The system is servo-regulated for stable positioning

at precession frequencies up to 650 Hz. Specially conceived for USP

precision processing, the opticalpath is polarization-maintaining and

accommodates pulse energies up to 300 µJ at 1030 nm and 65 µJ at

515 nm.

System Design

Active water cooling of beam-guidance components (including galvo axes)

and of spatially separated electronics makes the system robust against

load-dependent temperature fluctuations. Moreover, the system’s innovative

beam guidance provides suitability for up to 50 W lasers.

A sealed, gas-purged optical beam path(overpressure) guarantees optimum

cleanliness even in harsh industrial conditions – thereby enhancing system

service life and processing accuracy.