Suitable pulse durations

• Nanosecond / Picosecond / Femtosecond

• Max. Power: 150 W

• Max. Pulse energy: 1 mJ @ 1ps

Functions

• Masking of higher orders

• Integrated beam position stabilisation to ensure alignment

• Rotation of beam distribution

• Fine adjustment of spot pitch

• Switching between single-beam and multi-beam processing

Spot position error

• <3 µm @ f=100mm

Spot distributions

• e.g. 2×2. 4×4. …, 8×8.

user defined distributions

Galvanometer-Scanner

• Type: SCANLAB intelliSCAN III 14 or excelliSCAN 14

Control software – Photonic Tools

• Software for adjustment, calibration and control of the system

• Camera-assisted adjustment and calibration

Optional components

• Ext. camera system for intensity measurement