Why ZYGO technology?

We are experts in Coherence Scanning Interferometry (CSI). Our innovative and

differentiated enables the most precise and fastest measurement of surface topography.

3D areal surface roughness, step heights, flatness, film thickness, micro-geometry and

more are quantified down to sub-nanometer levels – with a single sensor solution.

• High-speed scanning and data processing for optimal throughput.

• Fully automated functionality and control of all hardware systems.

• Remote access API enables simple and complete control of the Mx™ software.

• Built in python scripting for creating custom functions and analyses.

Our experienced team of engineers and scientists are available to discuss your requirements

and metrology needs and can recommend optimal configurations to address your specific

requirements for speed, field-of-view, and part geometries. We look forward to partnering

with you on your next successful program.