AF09Z … AF38Z and AF40 … AF750 contactors, NFZ contactor relays
increase the voltage sag immunity and the uptime of semiconductor
processing equipment without use of specific accessory.
Definitions according to SEMI F47 (1)
SEMIF47 defines the voltage sag immunity required for
semiconductor processing, metrology and automated
test equipment, and on subsystems and components
which are used in the construction of semiconductor
processing equipment including but not limited to:
• Power supplies
• Generators
• Robots and factory interface
• Chillers, pumps, blowers
• AC operated contactors and contactor relays
• …
Voltage sag immunity
The ability of equipment to withstand momentary
electrical power interruptions or sags.
Voltage sag
An rms reduction in the AC voltage, at the power
frequency, for durations from a half cycle to a few
seconds. The IEC terminology for this phenomenon
is voltage dip.
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