Category: ZYGO

In ZYGO’s systems, interferometer is contained in the microscope objective,

which provides both magnification as well as the integrated reference; and a filtered

white light source is used to illuminate the surface through the objective.

The short coherence length of white light causes the focus depth over which

interference occurs to be quite shallow – this enables CSI to examine rough and

discontinuous surfaces just as easily as smooth ones.

To create a map of the test surface, the objective or the entire microscope head

is moved (‘scanned’) perpendicular to the sample under test. A high speed, low noise

digital camera monitors the interference signal, and the advanced signal processing

algorithms in ZYGO’s Mx software interpret this signal for each pixel in the field of

view in seconds.

CSI presents a number of advantages over other surface measurement

technologies:

• It delivers very precise nanometer or sub-nanometer height precision at all magnifications

• It is a fast, consistent measurement, typically producing – 1.9 million pixels in just a

few seconds – again, at all magnifications

• CSI can be used on surfaces of virtually any material, color, and surface conditions.

It functions just as well whether the sample is super-smooth, very rough, flat, curved,

sloped, optically transparent, translucent, or opaque.

• CSI is able to use additional signal processing to measure in the presence of transparent

optical films that confound other measurement methods.

These advantages combine to provide exceptional application versatility as the same

instrument can be used for a wide range of applications.

When specifying a 3D optical metrology solution, it is important to appreciate

that not all tools are the same, and users should look for solutions characterized

by their speed, superior measurement precision, magnification range, and the

ability to measure a broad spectrum of surfaces from the super-smooth to the

extremely rough.

ZYGO’s Coherence Scanning Interferometry (CSI) based 3D Optical Profilers

deliver best in class performance in all of these categories.

These systems use the principle of optical interference to measure a sample.

As shown in the image, illumination is divided into two paths where one travels

to a precision reference surface, and the other travels to the test surface.

The reflections from these two surfaces combine at a camera detector where they

interfere with each other, and a pattern of light and dark intensities is created.

That interference pattern represents the surface topography of the test surface.

In ZYGO’s systems, interferometer is contained in the microscope objective,

which provides both magnification as well as the integrated reference; and a filtered

white light source is used to illuminate the surface through the objective.

OEM 3D Optical Profiler Systems

Leverage and integrate our industry-leading technology

Do you have a need for precise, high-speed, non-contact surface metrology and inspection?

Are you an OEM manufacturer or system integrator looking to partner with a leading company

with the experience to ensure your success? ZYGO’s 3D Optical profilers are now available

as a fully integrable solution with a long history of successful production integrations.

Why partner with ZYGO?

We bring decades of experience working with OEM manufacturers serving critical in-line

metrology, inspection and process control for advanced manufacturing applications.

Key industries served include:

• Consumer Electronics

• Automotive & Precision Machining

• Semiconductor

• Optics & Photonics

Why ZYGO technology?

We are experts in Coherence Scanning Interferometry (CSI). Our innovative and

differentiated enables the most precise and fastest measurement of surface topography.

3D areal surface roughness, step heights, flatness, film thickness, micro-geometry and

more are quantified down to sub-nanometer levels – with a single sensor solution.

• High-speed scanning and data processing for optimal throughput.

• Fully automated functionality and control of all hardware systems.

• Remote access API enables simple and complete control of the Mx™ software.

• Built in python scripting for creating custom functions and analyses.

Our experienced team of engineers and scientists are available to discuss your requirements

and metrology needs and can recommend optimal configurations to address your specific

requirements for speed, field-of-view, and part geometries. We look forward to partnering

with you on your next successful program.

Optimize efficiency by using your ZYGO optical profiler right on the shop floor.

Now you can meet the most rigorous standards for precision metrology under

challenging environmental conditions. Our Guardian™ enclosures isolate the

metrology core from the surrounding environment, so you get optimal performance

when and where you need it. Designed and built by ZYGO exclusively for our optical

profilers, Guardian™ enclosures are built to perform and last.

Ergonomic Design

The system is designed to be a self-contained unit, which can be operated from standing

or seated positions. All user interface peripherals can be positioned and adjusted.

A large front-side opening makes the task of loading and unloading test parts and fixtures

simple and efficient. The unit’s interior lighting conveniently illuminates the work area

as well. For serviceability, access panels are also provided around the unit.

Durable, ergonomic and compact, the Guardian™ industrial enclosure for ZYGO 3D Optical

Profilers provides protection from harsh environments, while maintaining performance and

functionality.

Key Features:

• Isolated metrology core

• Compact footprint

• Acoustical damping side panels

• Ergonomic controls

• Large access door with cover

• Removable access panels for serviceability

• Workspace lighting

• Electronics cooling

• High quality build and finish

• Designed and built specifically for ZYGO optical profilers

Maximize ROI

The Nexview™ 650 has been designed and built to ensure that the system

provides value for years to come.  With a metrology area that accommodates

lateral dimensions up to 650 x 650 mm and sample load of > 100 kg,

a vertical range of 150 mm, and options for a fully enclosed, or partially

enclosed system, the Nexview™ 650 provides maximum flexibility for large

samples that require precision 3D optical profiling.

For example. The system accommodates:

Any of today’s standard PCB substrate panel sizes

Custom defined sample holders for flexible sheets, etc. which can be deployed

with little concern for their mass on the high load Y stage Large, high mass

injection molding plates that benefit from precise non-contact inspection to

minimize potential precision surface damage Customized chucks and sample

holders can be designed or customer supplied to adapt the system for smaller

panels or even singulated substrates to maximize application flexibility.

And the system’s integrated recipe-driven automation software enables

hands-free metrology of multiple features on each panel, all in a single

workstation, reducing production time and increasing process knowledge.

The Nexview™ 650 metrology system is an inspection tool for automated

measurement of injection molding tooling, PCBs, glass panels and other

samples requiring an extended work volume up to 650 x 650 mm.

It provides 2D & 3D measurements of a variety of surface features with

sub-nanometer vertical precision and sub-micron lateral precision.

Powerful Performance

Coherence Scanning Interferometry (CSI) is the measurement technology

at the core of the Nexview™ 650 system.

This non-contact technique provides high-precision, and high-value surface

metrology benefits including:

• Measures virtually all types of surfaces, from rough to super smooth,

including thin films, steep slopes, and large steps.

• Sub-nanometer measurement precision is independent of field magnification

• Gage capable performance – exceptional precision and repeatability for the

most demanding production applications.

• SureScan™ vibration tolerance technology – robust operation in virtually any

environment.

• Mx™ software enables seamless data exchange with other ZYGO Profilers

including ZeGage™ Pro, NewView™ 9000. and Nexview™ NX2.

Performance, Value, and Versatility

Flexibility is the hallmark of ZYGO’s NewView products. The NewView 9000 profiler offers

exceptional value with applications as varied as flatness, roughness and waviness, thin films,

step heights and more.

All NewView 9000 profilers are equipped with a triple-zoom turret which can be populated

with discrete zoom optics tailor made for the system. Sample staging configurations range

from completely manual to fully automated with encoded travel.

Regardless of your configuration, all NewView 9000 systems offer high-accuracy measurements,

ease of use, and fast measurements, all at an attractive price point that make it the ideal choice

for versatility and value in 3D optical profilers.

Some of the differentiated features targeted at making users’ metrology better, faster, and more reliable:

• Large-area 1.9 MP sensor with high sensitivity lets you see more in a single measurement

• High-speed measurements take only seconds for improved productivity and process control

• Automated part focus and setup minimizes operator variability and training while reducing the

time to data

• Gage-capable performance through exceptional precision and repeatability for the most demanding

production applications.

• Vibration robust metrology with SureScan technology and available built-in isolation enables high

quality metrology even in vibration-prone environments

• SmartPSI™ technology for ultra-fast profiling of ultra-smooth surfaces

• 2D and 3D correlation provides confidence in your measurements with results that comply to ISO

25178 and ISO 4287 standards.

• Mx™ software for instrument control, analysis, and measurement automation

The NewView™ 9000 3D optical surface profiler provides powerful versatility in non-contact

optical surface profiling. With the system, it is easy and fast to measure a wide range of 

surface types, including smooth, rough, flat, sloped, and stepped. All measurements are

nondestructive, fast, and require no sample preparation.

At the core of the system is ZYGO’s Coherence Scanning Interferometry (CSI) technology

which delivers sub-nanometer precision at all magnifications, and measures a wider range

of surfaces faster and more precisely than other commercially-available technologies,

thus optimizing your return on investment.

Flexible Configurations

NewView 9000 Stage & Work AreaThe NewView 9000 profiler features an open work area, with

clear lines of sight, to help make measurement setups and changeovers simple and quick.

Systems can be equipped with a variety of sample staging that range from fully manual X/Y and

tilt stages, to fully automated stages with 150 mm of travel and 4 degrees of tilt. With the integrated

isolation system and compact size, it is well suited for benchtop installations; using the optional stand

and workstation make an ideal production-style system.