Honeywell ZephyrTM Digital Airflow Sensors

HAF Series – High Accuracy

Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow and

compensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors

provide a fast response to air or gas flow.

Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are

available at ±50. ±100. ±200. ±400 or ±750 SCCM. Custom flow ranges are also available. The sensors are fully calibrated

and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).

The HAF Series is compensated over the temperature range of 0 °C to 50 °C [32 °F to 122 °F] and operates across a

temperature range of -20 °C to 70 °C [-4 °F to 158 °F]. The state-of-the-art ASIC-based compensation provides digital (I2C)

outputs with a response time of 1 ms.

These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge

Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin films

of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully-designed airflow channel to

provide repeatable response to flow.

Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability

to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable

substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

What makes our sensors better?

• Fast response time

• Wide range of airflows

• Customizable flow ranges and configurable package styles

• Linear output

• High stability

• Low pressure drop