Nexview™ NX2 3D Optical Profiler

Designed for the most demanding applications, the Nexview™ NX2 3D optical profiler

combines exceptional precision, advanced algorithms, application flexibility,

and automation into a single package that represents ZYGO’s most advanced

Coherence Scanning Interferometric (CSI) profiler.

The completely non-contact technology optimizes the return on investment by delivering

sub-nanometer precision at all magnifications and measuring a wider range of surfaces

faster and more precisely than other comparable technologies commercially available.

With applications as varied as flatness, roughness and waviness, thin films, step heights

and more on virtually any surface and material, Nexview NX2 truly is the no-compromise

profiler.

As the latest generation flagship, Nexview™ NX2 provides a wide range of differentiated

features targeted at making users’ metrology better, faster, and more reliable:

• Large-area 1.9 MP sensor with high sensitivity lets you see more in a single measurement

• High-speed measurements take only seconds for improved productivity and process control

• Automated part focus and setup minimizes operator variability and training while reducing

the time to data

• Gage capable performance through exceptional precision and repeatability for the most

demanding production applications.

• Vibration robust metrology with SureScan technology and built in isolation enables high

quality metrology even in vibration-prone environments

• SmartPSI™ technology for ultra-fast profiling of ultra-smooth surfaces

• 2D and 3D correlation provides confidence in your measurements with results that comply

to ISO 25178 and ISO 4287 standards.

• Mx™ software for instrument control, analysis, and measurement automation

• True Color imaging for enhanced visualization

• Variable image zoom with three included zoom lenses lets users optimize the field of view

and maximize instrument flexibility

Flexible Confi gurations

Gantry Risers

Optional 50 mm (2 in.) and 150 mm (6 in.)

base riser kits work with the included 75 mm head riser to increase standard

work volume by more than 8 inches, to enable access to very large parts and

deeply recessed surfaces.

Software

Additionally, optional software licenses for vision analysis and transparent films

analysis enable multifunctional tool use for a wider variety of applications such

as materials characterization, precision machining, prosthetics, MEMS, semiconductor,

consumer electro-optics, and opticalsurface manufacturing.

Objectives

ZYGO maintains the largest selection of interferometric objectives including:

• Standard working distance objectives from 1× to 100× magnifi cation.

Our 100× objective with 0.85 NA has the fi nest optical resolution of any

interferometricprofi ler.

• Long working Distance (LWD), and superlong working distance (SLWD)

objectives from 1× to 10× magnifi cation.

• Specialized glass compensated (GC) objectives enable sample observation

through a transmissive window.

Features

Multiple data collection techniques provide maximum application fl

exibility— for surface heights from angstroms to millimeters

SureScan™ technology enables precision metrology in vibration-prone

environments

Smart PSI technology enables sub-Å surface metrology in seconds

Correlation to 2D and 3D standards with compliance to ISO 25178

topography results

Streamlined Mx™ software

Built in pass/fail, SPC, reporting, and run statistics

Built in pneumatic vibration isolation

Open structure provides clear part visibility and access

Built in 75 mm head riser accommodates taller samples

Optional thick fi lms analysis for transparent films >400 nm thick

Optional advanced thin fi lms software for films 50-1000 nm

Optional 2D analysis Vision Software Suite

Performance Surface Topography Repeatability

0.06 nm for all magnifi cations

Repeatability of the RMS

0.005 nm

Sample Stage

XY travel:  200 mm

Tilt:  +/- 4°

Capacity:  20 lbs

System Options

Encoded XYZ stages

200×325 mm long travel XY stage

Theta stage

Nexview™ NX2 profi ler product highlights

An all-new advanced non-contact 3D imaging and metrology

tool—with high fi delity surface mapping and visualization—

for surface applications demanding precise quantitative,

topographic, volumetric, and texture characterization.

Superior measurement visualization, capabilities, and performance

Nexview™ NX2 profi ler represents a signifi cant advantage over

other metrology methods. A fully automated optical head makes

confi guration of advanced metrology applications easy, robust

and repeatable. Interactive user-confi gurable data plots reveal

surface characteristics through traditional 2D and 3D plots,

as well as more advanced slope analysis, PSD, and true color imaging.

Whether for measurement precision, speed, robust performance,

or visualization, the Nexview NX2 profi ler is the ideal choice.

Mx software is ZYGO’s platform for instrument control and data analysis.

Using a simple workfl ow based concept, users easily navigate the metrology

experience from setup through analysis and reporting.

Interactive and detailed plots show full 2D or 3D data; profi le slices,

material ratio, slope analysis, and PSD views. With built-in SPC,

pass/fail indication, data reporting and run charts, production quality

analysis is simple.