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Eaton EDR-5000 Metering Features

Metering Features

• Amperes: Positive, negative and zero sequence .

• Ampere demand .

• Volts: Positive, negative and zero sequence .

• Phase angles .

• Volt-amperes and VA demand .

• Watts and kW demand .

• kWh (forward, reverse, net)

• Vars and kvar demand

• kvarh (lead, leg and net) .

• Power factor .

• Frequency .

• % THD V and I .

• Magnitude THD V and I

• Minimum/maximum recording .

• Sync Values

• Trending (load profile over time)

Monitoring Features

• Trip coil monitor

• Breaker wear primary and secondary (accumulated interrupted

current) .

• Oscillography (6000 cycles total) .

• Fault data logs (up to 20 events) .

• Sequence of events report (up to 300 events) .

• Clock (1 ms time stamping) .

Eaton Protection Features EDR-5000

Features

Protection Features

• Phase overcurrent elements:

• Three instantaneous elements with timers ( 50P[1], 50P[2], and

50P[3])

• Three inverse time overcurrent elements (51P[1], 51P[2], and

51P[3])

• 11 standard curves

• Instantaneous or time delay reset

• Voltage Restraint (51P[2], and 51P[3])

• Directional Control (All Elements)

• Ground overcurrent elements:

• Two instantaneous measured elements with timers (50X[1],

and 50X[2])

• Two instantaneous calculated elements with timers (50R[1],

and 50R[2])

• Two inverse time overcurrent measured elements (51X[1], and

51X[2])

• Two inverse time overcurrent calculated elements (51R[1], and

51R[2])

• 11 standard curves

• Instantaneous or time delay reset

• Directional Control (All Elements)

• Breaker failure (50BF) .

• Phase unbalance negative sequence overcurrent (46[1], 46[2])) .

• Phase voltage unbalance and sequence protection (47[1], 47[2]) .

• Main 3-phase under/overvoltage (27M[1], 27M[2], 59M[1], 59M[2])

• Auxiliary single-phase under/overvoltage (27A[1], 27A[2], 59A[1],

59A[2])

• Ground fault overvoltage relay (59N[1], 59N[2])

• 6 Frequency elements that can be assigned to: over frequency,

under frequency, rate of change, or vector surge (81[1], 81[2],

81[3], 81[4], 81[5], 81[6])

• Apparent and displacement power factor (55A[1], 55A[2], 55D[1],

55D[2]) .

• Forward and Reverse Watts (32[1], 32[2], 32[3])

• Forward and Reverse Vars (32V[1], 32V[2], 32V[3])

• Synch Check (25)

• Autoreclosing (79)

• Zone interlocking for bus protection (87B) .

• Switch onto fault protection

• Cold load pickup

AMAT Applied Materials Aera 6 Mask Inspection

The Applied Aera™ 6 Mask Inspection system is a sixth generation 193nm-based

inspection tool, unique in combining true aerial imaging with cutting-edge

high-resolution imaging.

Equipped with a new lithography-grade lens and double CCD system, the Aera 6

demonstrates enhanced signal-to-noise ratio for both standard high-resolution

applications and aerial inspection with improved throughput. Such capabilities

makes it the tool of choice for Memory and Logic most advanced nodes, including

those with aggressive optical proximity correction, such as inverse lithography

and EUV mask inspection. The system performs highly sensitive mask inspection,

as required for double- and quadruple-patterning lithography technologies, while

maintaining a very low false alarm rate.

Designed to emulate a lithography scanner, the Aera 6 system delivers a higher

inspection success rate over other high-resolution inspection systems with

advanced masks. Combined with its inherent automatic defect classification as

printing or non-printing, and by focusing on advanced AI algorithmic solutions,

the system allows mask makers to extend ArF technology to next-generation

nodes.

The Aera 6 system expands the mask inspection capabilities of mask shops and

fabs to promote longer mask lifetimes and reduce mask-related costs.

These capabilities include early haze detection, complete 193nm and EUV exposure

-degradation monitoring, 2.5nm resolution review of edge dislocation defects, and

full-mask critical dimension (CD) uniformity mapping using the IntenCD™ system.​

AMAT Applied Materials Cmp Tool Controller 0195-14157

Overview

This is a rack-mount industrial PC / system controller assembly for AMAT CMP

(Chemical Mechanical Planarization) semiconductor polishing tools, assembled

in USA. It acts as the main process control unit for CMP polishing head, platen,

slurry, endpoint, motion and I/O sequencing of the wafer planarization system.

Main Internal Components

Industrial motherboard: ADLINK MI-220

DAC/ADC board: PCB 1007-0101

Interface board: T115-0005 / PCB 1007-0097 REV 2C

Power supply: SOLA SDN 20-24-100C (24V DC power module)

Mechanical & Physical Info

Form factor: 4U rack mount enclosure with front handles

Weight: ~22 kg

Front panel: Power switch + 6 control buttons

Rear panel: Multiple DB serial ports, USB, power inlet, analog/digital I/O terminals

Cooling: Internal fan forced air cooling

Function

• Host control of CMP process recipe execution

• Real-time acquisition of polishing pressure, platen speed, temperature, slurry

flow and endpoint signals

• Motion control and interlock safety logic for CMP polishing head and platens

• Communication between tool host, chamber sensors and actuator subsystems

• Data logging, fault diagnosis and tool state management for CMP platform

Application

Applied Materials Reflexion series 300mm CMP polishing tools for wafer

planarization in semiconductor fab.

The EDR-5000 distribution protection relay includes programmable logic functions

The EDR-5000 distribution protection relay includes programmable

logic functions . Logic gates and timers may be defined and arranged

for customized applications . Programmable logic control functions

make the EDR-5000 relay ideally suited for main-tie-main and main

1/main 2 transfer schemes . Flash memory is used for the program

ming and all settings are stored in nonvolatile memory . The relay

allows for four preprogrammed setting groups which can be acti

vated through software or contact input .

Flash memory is used for the programming and all settings are

stored in nonvolatile memory . The relay allows for four prepro

grammed setting groups which can be activated through software,

the display or a contact input .

The EDR-5000 distribution protection relay has mass memory for

data storage and a real-time clock with 1 ms time resolution . The

relay will log 300 sequence of event records, 20 detailed trip logs,

minimum/maximum values, load profiles, breaker wear information

and oscillography data .

The EDR-5000 has eight programmable binary inputs, 2 normally

opened and 8 Form C heavy duty outputs and one form C signal

alarm relay . It can be powered from 19 Vdc to 300 Vdc or 40 Vac to

250 Vac auxiliary power

Eaton’s EDR-5000 distribution protection relay

General Description

Eaton’s EDR-5000 distribution protection relay is a multi-functional,

microprocessor-based relay for feeder circuits of all voltage levels .

It may be used as a primary protection on feeders, mains and tie

circuit breaker applications; or as backup protection for transformers,

high voltage lines and differential protection . The relay is most com

monly used on medium voltage switchgear applications

The EDR-5000 distribution protection relay provides complete cur

rent, voltage, and frequency protection and metering in a single,

compact case . The relay has four current inputs rated for either 5

amperes or 1 ampere and four voltage inputs . Three of the voltage

inputs are to be connected to the 3-phase power voltage for voltage

protection and for metering . They can be connected in wye-ground

or open delta configuration . The fourth voltage is for independent

single-phase undervoltage/overvoltage protection, or ground protec

tion for an ungrounded system .

The maintenance mode password protected soft key can be used for

arc flash mitigation to change to an alternate settings group, set to

have instantaneous elements only . The multiple setting groups can

also be changed, via communications or a digital input .

An integral keypad and display is provided for direct user program

ming and retrieval of data without the need of a computer . 14 pro

grammable LEDs provide quick indication of relay status .

A front USB port is provided for direct computer connection . An

RS-485 communication port on the back is standard for local area

networking using Modbus-RTU or DNP3 . An optional Ethernet port

and protocols are available .

Eaton EDR-5000 Key Features, Functions and Benefits

Key Features, Functions and Benefits

• Microprocessor-based protection with monitoring and control for

medium voltage main and feeder applications .

• Current, voltage, and frequency protection for electrical power

distribution systems .

• Complete metering of voltage, currents, power, energy, mini

mum/maximum and demand functions .

• Complete metering, protection, and control in a single compact

case to reduce panel space, wiring and costs .

• Integral test function reduces maintenance time and expense .

• Zone selective interlocking improves coordination and tripping

time, and saves money compared to a traditional bus differential

scheme .

• Programmable logic control functions for main-tie-main transfer

schemes* .

• Reduce trouble shooting time and maintenance costs- Trip and

event recording in non-volatile memory provides detailed informa

tion for analysis and system restoration . 6000 cycles of waveform

capture aids in post fault analysis (viewable using Powerport-E

software)

• Minimum replacement time- Removable terminal blocks ideal in

industrial environments

• Front USB port and Powerport-E software provides local com

puter access and user-friendly windows based interface for relay

settings, configuration, and data retrieval .

• Breaker open/close from relay faceplate or remotely via commu

nications .

• Fast an easy troubleshooting, improved maintenance procedures

and increased device security . Provides detailed traceability for

system configuration changes

• Relays self-diagnostics and reporting improves uptime and trou

bleshooting .

• Breaker trip circuit monitoring improves the reliability of the

breaker operation

EBR-3000/EBR-Z Eaton high impedance bus differential relay

General description

The EBR-3000 relay, combined with an EBR-Z (EBR-3Z), is a digital

protection relay designed for high impedance differential protection

schemes . The intuitive operating system with validation checks and

extensive commissioning functions such as the built-in fault simula

tor allow safe and time-optimized maintenance and commissioning .

The parameter setting and evaluation software PowerPort-E can be

used consistently across the entire family of E-Series relays .

The principle of the high impedance differential protection is compa

rable with low impedance differential protection: Calculate and moni

tor the sum of all the currents flowing into the protected object, and

under non-fault conditions the sum is zero . Any differential current,

however, is forced through the high impedance of the high imped

ance relay .

The input of the high impedance relay consists of a resistance

(EBR-Z) and an overcurrent protection element (ANSI 87 in the EBR

3000) .

The following convention is important to know: Even though the

EBR-3000 measures the currents flowing through the stabilizing

resistor, all the measurements are presented as a voltage across

this stabilizing resistor (which is 2000 Ω for the EBR-Z) . The burden

of the EBR-3000 measuring input (which is in series with the EBR-Z

resistor) can be neglected compared to the 2000 Ω impedance .

The EBR-3000 monitors the magnitude of this voltage to differenti

ate between in-zone and through faults .

A varistor is built into the EBR-Z . It is connected across the input of

the relay to avoid damage to the relay caused by high voltage . The

varistor needs to be able to conduct significant power as the paral

leled CTs deliver current under special fault circumstances (e . g . in

case of a breaker failure) for more than 30 cycles .

To prevent damage to the relay due to system issues, a lockout relay

is required to short-circuit the high impedance when an trip is initi

ated .

Eaton Arc Flash Relay Introduction

Introduction

Flexible options allow installers to choose between fiber optic

loop cable that is installed in the field and can be labor intensive,

or wired point sensors that are factory-installed, reducing

labor time and cost as well as streamlining equipment

lead times.

The system can measure both light and current to eliminate

nuisance operation, and offers an innovative modular design

that allows for simple integration into electrical assemblies,

ideal for both new and retrofit installations. The system also

helps address arc flash safety concerns outlined in National

Fire Protection Agency (NFPA) standard 70E, which covers

employee workplace electrical safety requirements.

Eaton EBR-3000/EBR-Z Control functions

Control functions

• Programmable I/O

• Programmable LEDs

• Multiple setting groups (up to 4)

Communication (note 1)

• Local HMI

• Front USB communication port

• Remote communication port

• RS-485 terminals

• Ethernet RJ45

• Fiber optic ST

• RS-485 D-SUB

• LC duplex fiber optic

• IRIG-B

• Protocols

• Modbus RTU

• Modbus TCP

• IEC 61850 (MMS and GOOSE)

• DNP3-RTU

• DNP3-TCP/UDP

• Profibus-DP

Physical characteristics

EBR-3000 and EBR-Z mounted individually:

• Height: 8 .62 in . (219 mm)

• Width: 6 .82 in . (173 mm)

EBR-3000 and EBR-Z mounted together:

• Height: 8 .62 in . (219 mm)

• Width: 12 .5 in . (317 .5 mm)

• Depth: 7 .5 in . (190 mm), 5 .56 in* (141 mm*)

* Depth behind panel with projection mounted enclosure

Listings/certification

• UL, CSA, CE

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