Features

Multiple data collection techniques provide maximum application fl

exibility— for surface heights from angstroms to millimeters

SureScan™ technology enables precision metrology in vibration-prone

environments

Smart PSI technology enables sub-Å surface metrology in seconds

Correlation to 2D and 3D standards with compliance to ISO 25178

topography results

Streamlined Mx™ software

Built in pass/fail, SPC, reporting, and run statistics

Built in pneumatic vibration isolation

Open structure provides clear part visibility and access

Built in 75 mm head riser accommodates taller samples

Optional thick fi lms analysis for transparent films >400 nm thick

Optional advanced thin fi lms software for films 50-1000 nm

Optional 2D analysis Vision Software Suite

Performance Surface Topography Repeatability

0.06 nm for all magnifi cations

Repeatability of the RMS

0.005 nm

Sample Stage

XY travel:  200 mm

Tilt:  +/- 4°

Capacity:  20 lbs

System Options

Encoded XYZ stages

200×325 mm long travel XY stage

Theta stage