Exceptional Resolution

For alignment applications, outstanding step-to-step

resolution is critical. The ALS130H meets this demand with

a resolution of 0.5 nm when coupled with Aerotech

controls.

The direct-drive linear motor allows the ALS130H to make

precise, small resolution steps. This is particularly

important in alignment applications where step accuracy is

Bi-directional repeatability to 75 nm

Direct-drive linear motor for ultra-precise

motion

High-accuracy noncontact glass scale linear

encoder

Anti-cage creep cross-roller bearings for

smooth motion

Outstanding performance in a small footprint

critical. Furthermore, the linear motor and high resolution

encoder system also provides excellent in-position stability.

Superior Geometry

Aerotech’s ultra-stiff construction and compact two-piece

design result in a stage with unmatched geometrical

tolerances. As a result, straightness and flatness for the

standard stage is <±2 µm over the entire travel.