Bi-directional repeatability to 75 nm

Direct-drive linear motor for ultra-precise motion

High-accuracy noncontact glass scale linear encoder

Anti-cage creep cross-roller bearings for smooth motion

Outstanding performance in a small footprint

The ALS130H, with its sub-nanometer resolution, superior

bi-directional repeatability, and exceptional low-velocity

performance, is the unparalleled solution for high

performance test, measurement, inspection, and other

demanding applications.

Linear Motor Drive

Unlike many stages that utilize a side-drive lead screw, the

ALS130H employs a center-driven, non-cogging linear

motor as the driving element. Since the linear motor is a

direct-drive device, there is no backlash, windup, or

“stiction” that is normally associated with a lead screw or

ball-screw drive.

The linear motor drive also offers the advantage of higher

speeds and accelerations. The compact yet powerful linear

motor drives the ALS130H to a peak unloaded acceleration

of 1 g and a maximum velocity of 300 mm/s. The result is a

high-performance stage with outstanding throughput that

significantly outperforms comparable high-accuracy screwdriven stages.